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1. What can be used instead of a water flow switch (medium is water, water flow and stop, output switch signal, because water flow...
Use a better water flow detection switch, Karman vortex street, glass rotor type, if only detecting flow and stop, micro motion type can also be used.
2. ETCH Equipment - UPC/IHC
Introduction to UPC/IHC in ETCH Equipment UPC (Universal Pressure Controller) or IHC (Independent Helium Control) are important components of ETCH equipment, and although they have different names, their functions are the same.
. Here is a detailed introduction to UPC/IHC:1. Function and Function The main function of UPC/IHC is to control the pressure of helium gas, keeping it at a constant level, and simultaneously monitoring the flow rate of helium gas.
. In the ETCH process, helium is not used as a process gas, but flows through ESC (electrostatic suction cup) and helium holes to the back of the wafer for temperature transfer. Due to the continuous vacuum state inside the ETCH chamber, which operates at a pressure of several hundred mT, it is necessary to provide or absorb heat through ESC. In vacuum, due to the lack of a medium, heat is not easily transferred, and helium gas, due to its high specific heat capacity and being an inert gas, is not easily involved in the ETCH process and is therefore used as a medium for heat transfer.Secondly, the working principle of UPC/IHC is to set the pressure setpoint of helium gas through a recipe, which is usually given in the form of a voltage value.
. The system will compare this set value with the actual pressure value detected by the pressure sensor, and then control the opening of the valve based on the comparison res
III. Key Parameters and Focus For UPC/IHC, engineers need to pay attention to the following key parameters: Response time: refers to the time required for the pressure to reach the set value (SP) from 0T.
. If the time is too long, the machine may sound an alarm. At this point, it is necessary to check whether helium gas is flowing out by observing the pressure and flow rate. If the pneumatic valves or helium hand valves at the front and rear ends are not opened, or if there is a problem with the UPC circuit (such as no SP voltage value/feedback voltage), it may cause a long response time. If it is confirmed that there is gas but the adjustment time is too long, the PID (proportional integral derivative) parameters need to be adjusted. Pressure stability: refers to whether UPC/IHC can accurately control pressure. The stability of pressure is crucial for the ETCH process, as changes in pressure may affect key process parameters such as etching rate (ER).Fourth, Common Brands and Structures. Currently, common UPC brands in the market include MKS from the United States and HORIBA from Japan.
. Although these two companies have similar structures when designing UPC, there are differences in flow sensors, pressure sensors, and control algorithms. For example, MKSs 649 and HORIBAs GR500 are two different UPC products. Their design schematics all show the connection methods and working principles of key components such as
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